JPH0510569B2 - - Google Patents

Info

Publication number
JPH0510569B2
JPH0510569B2 JP20834485A JP20834485A JPH0510569B2 JP H0510569 B2 JPH0510569 B2 JP H0510569B2 JP 20834485 A JP20834485 A JP 20834485A JP 20834485 A JP20834485 A JP 20834485A JP H0510569 B2 JPH0510569 B2 JP H0510569B2
Authority
JP
Japan
Prior art keywords
floor
air
room
dust
floor surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP20834485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6269044A (ja
Inventor
Yasuo Nishiguchi
Toshihiko Yamazaki
Masayuki Maeda
Minoru Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Construction Co Ltd
Kyocera Corp
Original Assignee
Hitachi Plant Construction Co Ltd
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Construction Co Ltd, Kyocera Corp filed Critical Hitachi Plant Construction Co Ltd
Priority to JP20834485A priority Critical patent/JPS6269044A/ja
Publication of JPS6269044A publication Critical patent/JPS6269044A/ja
Publication of JPH0510569B2 publication Critical patent/JPH0510569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP20834485A 1985-09-20 1985-09-20 空気清浄室 Granted JPS6269044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20834485A JPS6269044A (ja) 1985-09-20 1985-09-20 空気清浄室

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20834485A JPS6269044A (ja) 1985-09-20 1985-09-20 空気清浄室

Publications (2)

Publication Number Publication Date
JPS6269044A JPS6269044A (ja) 1987-03-30
JPH0510569B2 true JPH0510569B2 (en]) 1993-02-10

Family

ID=16554718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20834485A Granted JPS6269044A (ja) 1985-09-20 1985-09-20 空気清浄室

Country Status (1)

Country Link
JP (1) JPS6269044A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008229830A (ja) 2007-03-23 2008-10-02 Showa Denko Kk 円盤状基板の製造方法

Also Published As

Publication number Publication date
JPS6269044A (ja) 1987-03-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees